Here some technology links for fabricating MEMS (micro- electro- mechanical system)
Hydrofluoric acid (HF) Vapor Phase Etching (VPE)
Hydrofluoric acid (HF) Vapor Phase Etcher (VPE)
MEMS release
Dry etching
HF, KOH, TMAH etching chuck
Wet etching
Electrostatic wafer clamping